探針臺(tái)是半導(dǎo)體表征參數(shù)測(cè)試測(cè)量非常常用的設(shè)備,應(yīng)用范圍非常廣泛。本文,我們僅就手動(dòng)探針臺(tái)及其半導(dǎo)體測(cè)試測(cè)量應(yīng)用進(jìn)行討論。首先,我們來看看對(duì)于探針臺(tái)(機(jī)械探針臺(tái))的定義:“Mechanical Probe Station: The probe station utilizes manipulators which allow the precise positioning of thin needles on the surfa...