Chuck StageX-Y travel coarse 300 mm x 300 mmX-Y travel fine 10 mm x 10 mm (resolution < 1 μm)Z up/down 10 mmTheta travel ± 7oPlanarity < ± 5μm 平坦度Probe Platen DriveZ trave l25mm resolution < ± 1 μmManual Microscope(1000X OR100x option)Travel rangeX-Y-Z 50 mm x 50 mm x 50 mmRes
【詳情】