Chuck Stage

X-Y travel coarse 300 mm x 300 mm

X-Y travel fine 10 mm x 10 mm （resolution < 1 μm）

Z up/down 10 mm

Theta travel ± 7o

Planarity < ± 5μm 平坦度

Probe Platen Drive

Z trave l25mm resolution < ± 1 μm

Manual Microscope（1000X OR100x option）

Travel rangeX-Y-Z 50 mm x 50 mm x 50 mm

Resolution <1um

Utilities：

Power：115/230 V, 50/60 Hz

Vacuum：-0.8 bar

Compressed air： 4 bar